Spectroscopic Ellipsometry of SIMOX (Separation by Implanted Oxygen): Thickness Distribution of Buried Oxide and Optical Properties of Top-Si Layer Article (Web of Science)

authors

publication date

  • 1997

webpage

published in

number of pages

  • 5

start page

  • 2581

end page

  • 2586

volume

  • 36

issue

  • Part 1, No. 5A