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Spectroscopic Ellipsometry of SIMOX (Separation by Implanted Oxygen): Thickness Distribution of Buried Oxide and Optical Properties of Top-Si Layer
Article (Web of Science)
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authors
Jayatissa, Ahalapitiya H
Yamaguchi, Tomuo
Nasu, Masahiro
Aoyama, Mitsuru
publication date
1997
webpage
http://dx.doi.org/10.1143/jjap.36.2581
published in
JAPANESE JOURNAL OF APPLIED PHYSICS
Journal
Additional Document Info
number of pages
5
start page
2581
end page
2586
volume
36
issue
Part 1, No. 5A