Structural studies of hydrogen‐bombarded silicon using ellipsometry and transmission electron microscopy Article (Web of Science)

authors

  • Yacobi, B. G.
  • Jones, K. M.
  • Tsuo, Y. S.

publication date

  • 1986

number of pages

  • 5

start page

  • 153

end page

  • 158

volume

  • 4

issue

  • 2