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Structural studies of hydrogenâbombarded silicon using ellipsometry and transmission electron microscopy
Article (Web of Science)
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authors
Collins, Robert W
Yacobi, B. G.
Jones, K. M.
Tsuo, Y. S.
publication date
1986
webpage
http://dx.doi.org/10.1116/1.573463
published in
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Journal
Additional Document Info
number of pages
5
start page
153
end page
158
volume
4
issue
2