Analysis of the growth processes of plasma-enhanced chemical vapor deposited diamond films from CO/H2 and CH4/H2 mixtures using real-time spectroellipsometry Article (Web of Science)

authors

  • Lee, Joungchel
  • Hong, Byungyou
  • Messier, R.
  • Strausser, Y. E.

publication date

  • 1997

webpage

published in

number of pages

  • 7

start page

  • 1929

end page

  • 1936

volume

  • 15

issue

  • 4