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JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS
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Overview
publication venue for
Design and fabrication of a micromachined free-floating membrane on a flexible substrate
. 12.
2013
Research
category
ENGINEERING, ELECTRICAL & ELECTRONIC
Category
MATERIALS SCIENCE, MULTIDISCIPLINARY
Category
NANOSCIENCE & NANOTECHNOLOGY
Category
OPTICS
Category
Identity
International Standard Serial Number (ISSN)
1932-5150
Other
journal abbreviation
J MICRO-NANOLITH MEM