Design and fabrication of a micromachined free-floating membrane on a flexible substrate

Article (Web of Science)

• cited authors: Sundani, Harsh; Devabhaktuni, Vijay; Melkonian, Christopher; Alam, Mansoor
• publication date: January 1, 2013
• webpage: Web of Science
• published in: JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS Journal

author keyword

• Kapton
• flexible substrates
• membrane
• microelectromechanical system
• micromachined
• polydimethylsiloxane

• category: OPTICS Category
• volume: 12
• issue: 1