Optical and electrical properties of H-2 plasma-treated ZnO films prepared by atomic layer deposition using supercycles Article (Web of Science)

International Collaboration

cited authors

  • Uprety, Prakash; Macco, Bart; Junda, Maxwell M.; Grice, Corey R.; Kessels, Wilhelmus M. M.; Podraza, Nikolas J.

publication date

  • September 1, 2018


author keyword

  • Dielectric function
  • H-2 plasma treatment
  • Optical and electrical properties
  • Spectroscopic ellipsometry
  • Terahertz
  • ZnO


start page

  • 91

end page

  • 100


  • 84