Optical and electrical properties of H-2 plasma-treated ZnO films prepared by atomic layer deposition using supercycles

Article (Web of Science)

• cited authors: Uprety, Prakash; Macco, Bart; Junda, Maxwell M.; Grice, Corey R.; Kessels, Wilhelmus M. M.; Podraza, Nikolas J.
• authors: Podraza, Nikolas J
• publication date: September 1, 2018
• webpage: Web of Science
• published in: MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING Journal

author keyword

• Dielectric function
• H-2 plasma treatment
• Optical and electrical properties
• Spectroscopic ellipsometry
• Terahertz
• ZnO

• category: PHYSICS, CONDENSED MATTER Category
• start page: 91
• end page: 100
• volume: 84