Growth Evolution of Si:H Prepared with SiH4 + Si2H6 as Studied by Real Time Spectroscopic Ellipsometry

Proceedings Paper (Web of Science)

• cited authors: Gautam, Laxmi Karki; Podraza, Nikolas J.; IEEE
• authors: Podraza, Nikolas J
• publication date: January 1, 2013
• webpage: Web of Science
• published in: 2012 IEEE 38TH PHOTOVOLTAIC SPECIALISTS CONFERENCE (PVSC), VOL 2 Book

author keyword

• amorphous silicon
• disilane
• ellipsometry
• phase diagrams

• category: PHYSICS, APPLIED Category
• start page: 605
• end page: 609