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Electrical properties of plasma enhanced chemical vapor deposition a-Si:H and a-Si1-xCx:H for microbolometer applications
Article (Web of Science)
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cited authors
Shin, Hang-Beum; Saint John, David; Lee, Myung-Yoon; Podraza, Nikolas J.; Jackson, Thomas N.
authors
Podraza, Nikolas J
publication date
November 14, 2013
webpage
Web of Science
published in
JOURNAL OF APPLIED PHYSICS
Journal
Research
category
PHYSICS, APPLIED
Category
Additional Document Info
volume
114
issue
18