Electrical properties of plasma enhanced chemical vapor deposition a-Si:H and a-Si1-xCx:H for microbolometer applications Article (Web of Science)

Industry Collaboration International Collaboration

cited authors

  • Shin, Hang-Beum; Saint John, David; Lee, Myung-Yoon; Podraza, Nikolas J.; Jackson, Thomas N.

authors

publication date

  • November 14, 2013

webpage

published in

category

volume

  • 114

issue

  • 18