Thermal annealing effect on zinc nitride thin films deposited by reactive rf-magnetron sputtering process

Article (Web of Science)

• cited authors: Wen, Ting; Gautam, Madhav; Soleimanpour, Amir M.; Jayatissa, Ahalapitiya H.
• authors: Jayatissa, Ahalapitiya H
• publication date: April 1, 2013
• webpage: Web of Science
• published in: MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING Journal

author keyword

• Crystal growth
• Electronic transport
• Optical properties
• Photoconductivity
• Thermal annealing
• Zinc nitride

• category: PHYSICS, CONDENSED MATTER Category
• start page: 318
• end page: 325
• volume: 16
• issue: 2