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Thermal annealing effect on zinc nitride thin films deposited by reactive rf-magnetron sputtering process
Article (Web of Science)
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cited authors
Wen, Ting; Gautam, Madhav; Soleimanpour, Amir M.; Jayatissa, Ahalapitiya H.
authors
Jayatissa, Ahalapitiya H
publication date
April 1, 2013
webpage
Web of Science
published in
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Journal
Research
author keyword
Crystal growth
Electronic transport
Optical properties
Photoconductivity
Thermal annealing
Zinc nitride
category
PHYSICS, CONDENSED MATTER
Category
Additional Document Info
start page
318
end page
325
volume
16
issue
2