High-efficiency and highly stable a-Si:H solar cells deposited at high rate (8 angstrom/s) with disilane grading process

Article (Web of Science)

• cited authors: Hou, Guofu; Fan, Qihua; Liao, Xianbo; Chen, Changyong; Xiang, Xianbi; Deng, Xunming
• authors: Deng, Xunming
• publication date: November 1, 2011
• webpage: Web of Science
• published in: JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A Journal

author keyword

• amorphous semiconductors
• elemental semiconductors
• hydrogen
• plasma CVD
• semiconductor growth
• silicon
• solar cells

• category: PHYSICS, APPLIED Category
• volume: 29
• issue: 6