Laser Fabrication of Sharp Conical Microstructures on Si Thin Films by Nd:YAG Laser Single Pulse Irradiation Proceedings Paper (Web of Science)

cited authors

  • Moening, Joe; Georgiev, Daniel; Nathan, A; Flewitt, A; Hou, J; Miyazaki, S; Yang, J

publication date

  • January 1, 2008


start page

  • 393

end page

  • 398


  • 1066