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Laser Fabrication of Sharp Conical Microstructures on Si Thin Films by Nd:YAG Laser Single Pulse Irradiation
Proceedings Paper (Web of Science)
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cited authors
Moening, Joe; Georgiev, Daniel; Nathan, A; Flewitt, A; Hou, J; Miyazaki, S; Yang, J
authors
Georgiev, Daniel G
publication date
January 1, 2008
webpage
Web of Science
published in
AMORPHOUS AND POLYCRYSTALLINE THIN-FILM SILICON SCIENCE AND TECHNOLOGY-2008
Book
Research
category
MATERIALS SCIENCE, COATINGS & FILMS
Category
Additional Document Info
start page
393
end page
398
volume
1066