Effect of temperature on capacitance-voltage characteristics of SOI

Article (Web of Science), Proceedings Paper (Web of Science)

• cited authors: Jayatissa, AH; Li, ZY
• authors: Jayatissa, Ahalapitiya H
• publication date: December 5, 2005
• webpage: Web of Science
• published in: MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY Journal

author keyword

• SIMOX
• SOI interface
• capacitance
• silicon nitride
• silicon-on-insulator
• temperature effect

• category: PHYSICS, CONDENSED MATTER Category
• start page: 331
• end page: 334
• volume: 124