Aluminum doped zinc oxide (AZO)-based pressure sensor

Article (Web of Science)

• cited authors: Samoei, Victor K.; Jayatissa, Ahalapitiya H.
• authors: Jayatissa, Ahalapitiya H
• publication date: March 1, 2020
• webpage: Web of Science
• published in: SENSORS AND ACTUATORS A-PHYSICAL Journal
• category: INSTRUMENTS & INSTRUMENTATION Category

keywords

• AZO
• Magnetron sputtering deposition
• Piezoresistance
• Pressure sensor

• volume: 303