Hybrid Edge Termination in Vertical GaN: Approximating Beveled Edge Termination via Discrete Implantations

Article (Faculty180)

cited authors

  • Nelson, Tolen; Pandey, Prakash; Georgiev, Daniel G; Hontz, Michael R; Koehler, Andrew D; Hobart, Karl D; Anderson, Travis J; Ildefonso, Adrian; Khanna, Raghav

authors

publication date

  • 2022

published in

start page

  • 6940

volume

  • 69