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Laser Fabrication of Sharp Conical Microstructures on Si Thin Films by Nd:YAG Laser Single Pulse Irradiation
Article (Faculty180)
Overview
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Overview
cited authors
Moening, Joe; Georgiev, Daniel
authors
Georgiev, Daniel G
publication date
2008
published in
AMORPHOUS AND POLYCRYSTALLINE THIN-FILM SILICON SCIENCE AND TECHNOLOGY-2008
Journal
Additional Document Info
start page
393
end page
398
volume
1066