Reactive radio frequency sputtering deposition and characterization of zinc nitride and oxynitride thin films Article (Faculty180)

cited authors

  • Jiang, Nanke; Georgiev, Daniel G.; Wen, Ting; Jayatissa, Ahalapitiya H.

authors

publication date

  • 2012

published in

start page

  • 1698

end page

  • 1704

volume

  • 520