The effects of the pressure and the oxygen content of the sputtering gas on the structure and the properties of zinc oxy-nitride thin films deposited by reactive sputtering of zinc Article (Faculty180)

cited authors

  • Jiang, Nanke; Georgiev, Daniel G.; Jayatissa, Ahalapitiya H.

authors

publication date

  • 2013

published in

volume

  • 28