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Focused ion beam and electron microscopy characterization of nanosharp tips and microbumps on silicon and metal thin films formed via localized single-pulse laser irradiation
Article (Faculty180)
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cited authors
Moening, Joseph P; Georgiev, Daniel G; Lawrence, Joseph G
authors
Georgiev, Daniel G
publication date
2011
published in
Journal of Applied Physics
Journal
Additional Document Info
start page
014304
volume
109