Single pulse excimer laser nanostructuring of thin silicon films: Nanosharp cones formation and a heat transfer problem Article (Faculty180)

cited authors

  • Eizenkop, Julia; Avrutsky, Ivan; Auner, Gregory; Georgiev, Daniel G; Chaudhary, Vipin

authors

publication date

  • 2007

published in

start page

  • 094301

volume

  • 101