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Fabrication of sharp conical microstructures on Si films by Nd: YAG-laser single-pulse irradiation
Proceedings (Faculty180)
Overview
Overview
cited authors
Moening, Joe P; Georgiev, Daniel G
authors
Georgiev, Daniel G
publication date
2008
publisher
IEEE
Organization
presented at event
2008 Conference on Lasers and Electro-Optics and 2008 Conference on Quantum Electronics and Laser Science
Conference