Zinc nitride films prepared by reactive RF magnetron sputtering of zinc in nitrogen containing atmosphere

cited authors

  • Jiang, Nanke; Georgiev, Daniel G; Jayatissa, Ahalapitiya H; Collins, Robert W; Chen, Jie; McCullen, Erik

authors

publication date

  • 2012

published in

start page

  • 135101

volume

  • 45