Excimer laser modification of thin AlN films Article (Faculty180)

cited authors

  • Georgiev, D G; Rosenberger, L W; Danylyuk, YV al; Baird, R J; Newaz, G; Shreve, G; Auner, G

authors

publication date

  • 2005

published in

start page

  • 45

volume

  • 249