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Laser Fabrication of Sharp Conical Microstructures on Si Thin Films by Nd: YAG Laser Single Pulse Irradiation
Article (Faculty180)
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cited authors
Moening, Joe; Georgiev, Daniel
authors
Georgiev, Daniel G
publication date
2007
published in
MRS Online Proceedings Library
Journal
Additional Document Info
start page
1
volume
1066