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Residual stresses in TiO2 anatase thin films deposited on glass, sapphire and Si substrates
Article (Faculty180)
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cited authors
Al-Homoudi, Ibrahim A; Zhang, Linfeng; Georgiev, D G; Naik, R; Naik, V M; Rimai, L; Ng, KY Simon; Baird, R J; Auner, G W; Newaz, G
authors
Georgiev, Daniel G
publication date
2005
published in
MRS Online Proceedings Library (OPL)
Journal
Additional Document Info
volume
875