Thermal annealing effect on zinc nitride thin films deposited by reactive rf-magnetron sputtering process Article (Faculty180)

cited authors

  • Wen, Ting; Gautam, Madhav; Soleimanpour, Amir M; Jayatissa, Ahalapitiya H

authors

publication date

  • 2013

published in

start page

  • 318

volume

  • 16