Toggle navigation
Browse
Home
People
Departments & Colleges
Research
Research Area Overlaps
Thermal annealing effect on zinc nitride thin films deposited by reactive rf-magnetron sputtering process
Article (Faculty180)
Overview
Additional Document Info
View All
Overview
cited authors
Wen, Ting; Gautam, Madhav; Soleimanpour, Amir M; Jayatissa, Ahalapitiya H
authors
Jayatissa, Ahalapitiya H
publication date
2013
published in
Materials Science in Semiconductor Processing
Journal
Additional Document Info
start page
318
volume
16