Extended phase diagrams for guiding plasma-enhanced chemical vapor deposition of silicon thin films for photovoltaics applications Article (Web of Science)

authors

  • Ferlauto, A. S.
  • Koval, R. J.
  • Wronski, C. R.

publication date

  • 2002

webpage

published in

number of pages

  • 2

start page

  • 2666

end page

  • 2668

volume

  • 80

issue

  • 15