The effect of inert gas plasma exposure on the surface structure of hydrogenated amorphous silicon (a‐Si:H) Article (Web of Science)

authors

  • Tuckerman, C. J.

publication date

  • 1986

webpage

published in

number of pages

  • 6

start page

  • 2343

end page

  • 2349

volume

  • 4

issue

  • 5