Calibration and data reduction for a UV-extended rotating-compensator multichannel ellipsometer Article (Web of Science)

authors

  • An, Ilsin
  • Zapien, J.A.
  • Chen, Chi
  • Ferlauto, A.S.
  • Lawrence, A.S.

publication date

  • 2004

published in

number of pages

  • 5

start page

  • 132

end page

  • 137

volume

  • 455-456