Toggle navigation
Browse
Home
People
Departments & Colleges
Research
Research Area Overlaps
Calibration and data reduction for a UV-extended rotating-compensator multichannel ellipsometer
Article (Web of Science)
Overview
Additional Document Info
View All
Overview
authors
An, Ilsin
Zapien, J.A.
Chen, Chi
Ferlauto, A.S.
Lawrence, A.S.
publication date
2004
webpage
http://dx.doi.org/10.1016/j.tsf.2003.11.221
published in
THIN SOLID FILMS
Journal
Additional Document Info
number of pages
5
start page
132
end page
137
volume
455-456