Real time spectroscopic ellipsometry characterization of structural and thermal equilibration of amorphous silicon–carbon alloy p layers in p-i-n solar cell fabrication Article (Web of Science)

authors

  • Fujiwara, H.
  • Koh, Joohyun
  • Lee, Yeeheng
  • Wronski, C. R.

publication date

  • 1998

webpage

published in

number of pages

  • 8

start page

  • 2278

end page

  • 2286

volume

  • 84

issue

  • 4