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Real time spectroscopic ellipsometry characterization of structural and thermal equilibration of amorphous silicon–carbon alloy p layers in p-i-n solar cell fabrication
Article (Web of Science)
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authors
Fujiwara, H.
Koh, Joohyun
Lee, Yeeheng
Wronski, C. R.
publication date
1998
webpage
http://dx.doi.org/10.1063/1.368361
published in
JOURNAL OF APPLIED PHYSICS
Journal
Additional Document Info
number of pages
8
start page
2278
end page
2286
volume
84
issue
4