Thin-film coalescence in hydrogenated amorphous silicon probed by spectroscopic ellipsometry with millisecond-scale resolution Article (Web of Science)

authors

  • Li, Y.-M.
  • An, Ilsin
  • Nguyen, H. V.
  • Wronski, C. R.

publication date

  • 1992

webpage

published in

number of pages

  • 3

start page

  • 2814

end page

  • 2817

volume

  • 68

issue

  • 18