Real time spectroellipsometry for optimization of diamond film growth by microwave plasma‐enhanced chemical vapor deposition from CO/H2mixtures Article (Web of Science)

authors

  • Lee, Joungchel
  • Hong, Byungyou
  • Messier, R.

publication date

  • 1996

webpage

published in

number of pages

  • 6

start page

  • 6489

end page

  • 6495

volume

  • 80

issue

  • 11