Optical characterization of a four-medium thin film structure by real time spectroscopic ellipsometry: amorphous carbon on tantalum Article (Web of Science)

authors

  • Cong, Yue
  • An, IIsin
  • Vedam, K.

publication date

  • 1991

webpage

published in

start page

  • 2692

volume

  • 30

issue

  • 19