Application of spectral and temporal weighted error functions for data analysis in real-time spectroscopic ellipsometry Article (Web of Science)

authors

  • Zapien, J.A.
  • Ferlauto, A.S.

publication date

  • 2004

webpage

published in

number of pages

  • 5

start page

  • 106

end page

  • 111

volume

  • 455-456