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Application of spectral and temporal weighted error functions for data analysis in real-time spectroscopic ellipsometry
Article (Web of Science)
Overview
Additional Document Info
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Overview
authors
Zapien, J.A.
Ferlauto, A.S.
publication date
2004
webpage
http://dx.doi.org/10.1016/j.tsf.2003.11.217
published in
THIN SOLID FILMS
Journal
Additional Document Info
number of pages
5
start page
106
end page
111
volume
455-456