Multichannel ellipsometer for real time spectroscopy of thin film deposition from 1.5 to 6.5 eV Article (Web of Science)

authors

  • Zapien, J. A.
  • Messier, R.

publication date

  • 2000

webpage

published in

number of pages

  • 9

start page

  • 3451

end page

  • 3460

volume

  • 71

issue

  • 9