Toggle navigation
Browse
Home
People
Departments & Colleges
Research
Research Area Overlaps
Multichannel ellipsometer for real time spectroscopy of thin film deposition from 1.5 to 6.5 eV
Article (Web of Science)
Overview
Additional Document Info
View All
Overview
authors
Zapien, J. A.
Messier, R.
publication date
2000
webpage
http://dx.doi.org/10.1063/1.1288260
published in
REVIEW OF SCIENTIFIC INSTRUMENTS
Journal
Additional Document Info
number of pages
9
start page
3451
end page
3460
volume
71
issue
9