Real-time spectroscopic ellipsometry studies of diamond film growth by microwave plasma-enhanced chemical vapour deposition Article (Web of Science)

authors

  • Hong, Byungyou
  • Wakagi, M.
  • Collins, Robert W
  • An, Ilsin
  • Engdahl, N.C.
  • Drawl, W.
  • Messier, R.

publication date

  • 1994

webpage

published in

number of pages

  • 6

start page

  • 431

end page

  • 437

volume

  • 3

issue

  • 4-6