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Waveform analysis with optical multichannel detectors: Applications for rapid‐scan spectroscopic ellipsometry
Article (Web of Science)
Overview
Additional Document Info
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Overview
authors
An, Ilsin
publication date
1991
webpage
http://dx.doi.org/10.1063/1.1142390
published in
REVIEW OF SCIENTIFIC INSTRUMENTS
Journal
Additional Document Info
number of pages
7
start page
1904
end page
1911
volume
62
issue
8