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Ion beam etching of GaAs and GaAs/AlGaAs heterostructures probed in real time by spectroscopic ellipsometry
Article (Web of Science)
Overview
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authors
Heyd, A. R.
An, Ilsin
Collins, Robert W
Cong, Yue
Vedam, K.
Bose, S. S.
Miller, D. L.
publication date
1991
webpage
http://dx.doi.org/10.1116/1.577320
published in
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Journal
Additional Document Info
number of pages
5
start page
810
end page
815
volume
9
issue
3