Ion beam etching of GaAs and GaAs/AlGaAs heterostructures probed in real time by spectroscopic ellipsometry Article (Web of Science)

authors

  • Heyd, A. R.
  • An, Ilsin
  • Collins, Robert W
  • Cong, Yue
  • Vedam, K.
  • Bose, S. S.
  • Miller, D. L.

publication date

  • 1991

number of pages

  • 5

start page

  • 810

end page

  • 815

volume

  • 9

issue

  • 3