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Evolutionary phase diagrams for the deposition of silicon films from hydrogen-diluted silane
Article (Web of Science)
Overview
Additional Document Info
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Overview
authors
Koh, Joohyun
Ferlauto, A.S.
Rovira, P.I.
Koval, R.J.
Wronski, C.R.
publication date
2000
webpage
http://dx.doi.org/10.1016/s0022-3093(99)00716-4
published in
JOURNAL OF NON-CRYSTALLINE SOLIDS
Journal
Additional Document Info
number of pages
4
start page
43
end page
47
volume
266-269