Evolutionary phase diagrams for the deposition of silicon films from hydrogen-diluted silane Article (Web of Science)

authors

  • Koh, Joohyun
  • Ferlauto, A.S.
  • Rovira, P.I.
  • Koval, R.J.
  • Wronski, C.R.
  • Collins, Robert W

publication date

  • 2000

published in

number of pages

  • 4

start page

  • 43

end page

  • 47

volume

  • 266-269