Toggle navigation
Browse
Home
People
Departments & Colleges
Research
Research Area Overlaps
LPCVD SiNx thin film on c-Si wafer by spectroscopic ellipsometry
Article (Web of Science)
Overview
Additional Document Info
View All
Overview
authors
Gautam, Laxmi Karki
Ye, Ligang
Podraza, Nikolas J
publication date
2016
webpage
http://dx.doi.org/10.1116/1.4954192
published in
SURFACE SCIENCE SPECTRA
Journal
Additional Document Info
number of pages
3
start page
51
end page
54
volume
23
issue
1