Real time spectroscopic ellipsometry studies of the nucleation and growth of p-type microcrystalline silicon films on amorphous silicon using B2H6, B(CH3)3 and BF3 dopant source gases Article (Web of Science)

authors

  • Koh, Joohyun
  • Fujiwara, H.
  • Koval, R. J.
  • Wronski, C. R.

publication date

  • 1999

webpage

published in

number of pages

  • 12

start page

  • 4141

end page

  • 4153

volume

  • 85

issue

  • 8