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Low‐energy hydrogen ion bombardment damage in silicon: An in situ optical investigation
Article (Web of Science)
Overview
Additional Document Info
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Overview
authors
Cavese, J. M.
publication date
1987
webpage
http://dx.doi.org/10.1116/1.574310
published in
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Journal
Additional Document Info
number of pages
6
start page
2797
end page
2803
volume
5
issue
5