Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Journal

publication venue for

Field emission properties of BN coated Si tips by pulsed ArF laser deposition. 17:237. 1999
Scanning tunneling microscopy of passivated Au nanocrystals immobilized on Au(111) surfaces. 17:2411. 1999
Damage to Si substrates during SiO2 etching: A comparison of reactive ion etching and magnetron-enhanced reactive ion etching. 12:567. 1994
In situ ellipsometry of thin-film deposition: Implications for amorphous and microcrystalline Si growth. 7:1155. 1989

publisher

American Vacuum Society Publisher

International Standard Serial Number (ISSN)

0734-211X