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In situ ellipsometric characterization and process control for amorphous thin film deposition
Article (Web of Science)
Overview
Additional Document Info
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Overview
publication date
1988
webpage
http://dx.doi.org/10.1016/0749-6036(88)90204-2
published in
Superlattices and Microstructures
Journal
Additional Document Info
number of pages
7
start page
729
end page
736
volume
4
issue
6