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Hot-wire deposition of amorphous and microcrystalline silicon using different gas excitations by a coiled filament
Article (Web of Science)
Overview
Additional Document Info
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Overview
authors
Deng, Xunming
Povolny, Henry S.
publication date
2003
webpage
http://dx.doi.org/10.1016/s0040-6090(03)00094-4
published in
THIN SOLID FILMS
Journal
Additional Document Info
number of pages
4
start page
304
end page
308
volume
430
issue
1-2