Structural properties of carbon films deposited by pulsed ArF laser ablation: effects of substrate temperature, bias and H2 pressure Article (Web of Science)

authors

  • Jayatissa, Ahalapitiya H
  • Sato, Fumio
  • Saito, Nobuo
  • Ohnishi, Hiroyuki
  • Takizawa, Kuniharu
  • Nakanishi, Yoichiro
  • Yamaguchi, Tomuo

publication date

  • 1998

webpage

published in

number of pages

  • 9

start page

  • 143

end page

  • 152

volume

  • 55

issue

  • 1-2