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Structural properties of carbon films deposited by pulsed ArF laser ablation: effects of substrate temperature, bias and H2 pressure
Article (Web of Science)
Overview
Additional Document Info
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Overview
authors
Jayatissa, Ahalapitiya H
Sato, Fumio
Saito, Nobuo
Ohnishi, Hiroyuki
Takizawa, Kuniharu
Nakanishi, Yoichiro
Yamaguchi, Tomuo
publication date
1998
webpage
http://dx.doi.org/10.1016/s0921-5107(98)00186-x
published in
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY
Journal
Additional Document Info
number of pages
9
start page
143
end page
152
volume
55
issue
1-2