Microstructural evolution of a-Si:H prepared using hydrogen dilution of silane studied by real time spectroellipsometry Article (Web of Science)

authors

  • Koh, Joohyun
  • Fujiwara, H
  • Lee, Yeeheng
  • Wronski, C.R

publication date

  • 1998

webpage

published in

number of pages

  • 4

start page

  • 73

end page

  • 77

volume

  • 227-230