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Spectroscopic ellipsometry on the millisecond time scale for real‐time investigations of thin‐film and surface phenomena
Article (Web of Science)
Overview
Additional Document Info
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Overview
authors
An, Ilsin
Li, Y. M.
Nguyen, H. V.
publication date
1992
webpage
http://dx.doi.org/10.1063/1.1143280
published in
REVIEW OF SCIENTIFIC INSTRUMENTS
Journal
Additional Document Info
number of pages
6
start page
3842
end page
3848
volume
63
issue
8