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Effect of hydrogen on the intrinsic stress in ion beam sputtered amorphous silicon films
Article (Web of Science)
Overview
Additional Document Info
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Overview
authors
Windischmann, H.
Cavese, J.M.
publication date
1986
webpage
http://dx.doi.org/10.1016/0022-3093(86)90001-3
published in
JOURNAL OF NON-CRYSTALLINE SOLIDS
Journal
Additional Document Info
number of pages
11
start page
261
end page
272
volume
85
issue
3