Effect of hydrogen on the intrinsic stress in ion beam sputtered amorphous silicon films Article (Web of Science)

authors

  • Windischmann, H.
  • Cavese, J.M.

publication date

  • 1986

webpage

published in

number of pages

  • 11

start page

  • 261

end page

  • 272

volume

  • 85

issue

  • 3