Toggle navigation
Browse
Home
People
Departments & Colleges
Research
Research Area Overlaps
In situ ellipsometry studies of the growth of hydrogenated amorphous silicon by glow discharge
Article (Web of Science)
Overview
Additional Document Info
View All
Overview
publication date
1986
webpage
http://dx.doi.org/10.1116/1.573871
published in
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Journal
Additional Document Info
number of pages
3
start page
514
end page
517
volume
4
issue
3