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Characterization of substrate temperature and damage in diamond growth plasmas by multichannel spectroellipsometry
Article (Web of Science)
Overview
Additional Document Info
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authors
Wakagi, M.
Hong, Byungyou
Nguyen, Hien V.
Drawl, W.
Messier, R.
publication date
1995
webpage
http://dx.doi.org/10.1116/1.579680
published in
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Journal
Additional Document Info
number of pages
6
start page
1917
end page
1923
volume
13
issue
4