Characterization of substrate temperature and damage in diamond growth plasmas by multichannel spectroellipsometry Article (Web of Science)

authors

  • Wakagi, M.
  • Hong, Byungyou
  • Nguyen, Hien V.
  • Drawl, W.
  • Messier, R.

publication date

  • 1995

webpage

published in

number of pages

  • 6

start page

  • 1917

end page

  • 1923

volume

  • 13

issue

  • 4